Method of manufacturing capacitor structure

ABSTRACT

A method of manufacturing a semiconductor device includes forming a source/drain region in a substrate. An interlevel dielectric layer is formed on the substrate. A conducting plug is formed in the interlevel dielectric layer. The conducting plug is electrically coupled to the source/drain region. A crown oxide is formed on the interlevel dielectric layer. A deep trench is formed in the crown oxide to expose a top wall and a sidewall of the conducting plug. A spacer is formed on the sidewall of the conducting plug. A metal-insulator-metal film is formed in the deep trench.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a divisional of U.S. patent application Ser. No.14/632,569, filed Feb. 26, 2015, which is herein incorporated byreference in its entirety.

BACKGROUND

Dynamic random access memory (DRAM) circuits are widely used in graphicand processor applications for storing data. The DRAM circuit includes anumber of memory cells, and each cell has a capacitor and a transfertransistor. The capacitor stores binary data, while the transfertransistor retains the charge. In the read cycle, the transfertransistor interrogates the cells through bit lines. A field effecttransistor is commonly used as the transfer transistor. The capacitorgenerally includes two electrodes separated by a barrier, for example,insulating material, to provide isolation.

Memory cells are likely to appear in two types, which include a deeptrench (DT) capacitor formed in the substrate under the transfertransistors and a cell having a stacked capacitor that is built over andbetween transfer transistors. The physical size of electronic devices isever reducing, and, as a result, the number of memory cells on a DRAMchip has increased dramatically in a short period. In the case of DTcapacitor, the deep trench is made smaller to conserve space on thesubstrate for other components. The downsizing can lead to a significantreduction in the perimeter of the deep trench, and the electrical chargecapability of the capacitor is strongly associated with the surfacearea.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1 is a schematic elevation cross-sectional view showing acapacitor-under-bit-line (CUB) DRAM cell in accordance with someembodiments of the instant disclosure;

FIG. 2 is a close-up view of the area A as shown in FIG. 1;

FIG. 3 is a flow chart showing a fabrication process of deep trenchcapacitor in accordance with some embodiments of the instant disclosure;and

FIGS. 4A-4F are schematic elevation cross-sectional views for thesequence of process for fabricating a deep trench capacitor inaccordance with some embodiments of the instant disclosure.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

Compact integrated circuits provide many advantages, for example,reduction in signal propagation time and noise susceptibility, higherclock frequencies and larger circuit real estate. Meanwhile, memory cellelectrodes must provide sufficient surface area for electrical charge.The surface area is directly proportional to the charge holdingcapacity, referred to as capacitance. In order to increase surface area,deep trench technique has been developed to boost capacitance in a givenarea. The fabrication of deep trenches in substrate is a means of makingcharge storage cells, known as DT capacitors. In a metal-insulator-metal(MIM) capacitor, which is linear in its response characteristics andtherefore commonly used in the logic device instead ofpoly-insulator-poly (PIP) capacitor, the deep trench is lined withdielectric material, and the surface area of the dielectric film isdirectly proportional to the capacitance. However, some adverse effectshave been discovered in the deep trench capacitor which is one of thefundamental components required to design a feasible device.

The depth of deep trenches increases, while the width remains mostlyunchanged. As a result, it leads to a high aspect ratio, which isdefined as the ratio of the depth of the etched structure relative toits width (i.e., if in a plan view, the structure is square orrectangular) or to its diameter (i.e., if in a plan view, the structureis circular or elliptical in shape). The profile and shape control ofthe deep trench is very important for the subsequent process becausemultiple films are conformingly deposited to the deep trench. The deeptrench etching process can be relatively complex. Etching is performedin equipment where gaseous species, usually containing Cl₂, F and Br,are ionised. A commonly seen issue is leakage when the films are crammedto a narrow corner.

In high capacity dynamic memories where data may be stored as a fewhundred or fewer individual electrons, the storage mechanism isinevitably highly transitory. Leakage of a few electrons alone can alterdata states of a stored bit, for example, 1 to 0 or 0 to 1. At the sametime, high refresh rates are required to prevent data corruption. Inturn, significant time as well as power is consumed due to high refreshrates, and a mostly undesired scenario where the memory access timeincreases. Such situation can severely compromise potential performance.Furthermore, even with the provision of redundant circuitry for a chipdesign, improper formation of a relatively small number of elements onthe chip (where the number of such elements greatly jumps to providedesired increase of integration density and memory capacity) can resultin a chip which ultimately fails to achieve its full function.

A dynamic random access memory (DRAM) cell may comprise any desiredtype, number, and combination of components, and these structures may beformed using any suitable process technique (e.g., processes similar tothose used to fabricate integrated circuits). Also, it should beunderstood that the capacitor structure and, further, that the disclosedembodiments may find use in any application where it is desired toprovide a smooth lamination or where a spacer is needed in trenches.

Attention is now invited to FIG. 1. FIG. 1 is a schematic elevationcross-sectional view showing a semiconductor substrate 10 having DRAMcells that is shown in partially completed state. The substrate 10 maybe a bulk semiconductor substrate or a silicon-on-insulator substrate,has an array of memory cell on the memory device region and iselectrically isolated by shallow trench isolation (STI) regions 12. Theformation of the STI regions 12 may include etching trenches into thesubstrate, depositing isolating materials (oxide, nitride orcombinations thereof) into the trenches, polishing off the excessisolating materials, and planarizing the trenches for the next level offabrication. In some embodiments, the memory device region is an N-typewell region for forming P-type transistors. In some embodiments, thememory device region is of P-type. A series of transfer transistor gateelectrodes 20 are formed of for example, doped polysilicon, metals,metal alloys or silicides, on the substrate 10. Each two immediatelyadjacent gate electrodes 20 share a common bit-line contact. Liners (notshown) are formed on the sidewalls of the gate electrodes 20 by blanketdepositing a dielectric layer and then etching. Lightly dopedsource/drain contact areas 17 are formed in the substrate 10 byimplanting appropriate impurities with the liners. The source/draincontact areas interpose between adjacent gate electrodes 20. The typesof the source/drain areas 17 depend on the types of the devices to beformed. Silicide regions (not shown) may be formed on the exposedregions of the gate electrodes 16 in order to reduce contact resistance.Because of the waved or crown-like contour of the gate electrodes 20,they are also known as crown capacitor.

Still referring to FIG. 1, a first etch stop layer 22 is conforminglyformed on the gate electrodes 20 and a portion of the substrate 10. Thestop layer may be made of, for example, silicon nitride (Si₃N₄).Typically, the first etch stop layer 22 is deposited by low pressurechemical vapour deposition (LPCVD). Next, an interlevel dielectric (ILD)layer 26 or sometimes referred to as a dielectric layer is depositedover the gate electrodes 20 that is blanketed by the first etch stoplayer 22 and is then planarized. The First ILD layer 26 may include, forexample, silicon oxide, low-k dielectric materials or the like and isdeposited by but not limited to LPCVD. The First ILD layer 26 isdeposited and planarized by chemical-mechanical polishing (CMP).

Subsequently, conventional photolithographic techniques and anisotropicplasma etching are used to etch through the First ILD layer 26 untilexposing the underlying source/drain areas 17 to form contact openingsfor capacitor nodes and for the shared bit-line contacts. A conductinglayer is deposited and fills the contact openings to form firstconducting plugs 24 for capacitors and a second contact plug 25 for thebit lines. The conducting layer is composed of tungsten or tungstenalloys and deposited by LPCVD to a thickness sufficient to fill thecontact openings. As shown in FIG. 1, a second etch stop layer 30 isdeposited over the First ILD layer 26 and followed by a crown oxide 40.The crown oxide 40 is deposited over the stop layer 26 by LPCVD andplanarized to a thickness determined by circuit design, but morespecifically to a thickness of between 6000 and 8000 Angstroms.

Next, deep trenches 1 are formed in the crown oxide 40 aligned over thefirst contact plugs 24. The deep trenches 1 are etched usingconventional photolithrographic techniques to recess the crown oxide 40,and the crown oxide 40 defines the height of the deep trenches 1. Aspacer 5 lines the sidewalls of the deep trenches 1 and ametal-insulator-metal film 3 is conformingly deposited over the deeptrenches 1. Materials of the spacer 5 may be, for example, siliconnitride (SiN) or the like. The metal-insulator-metal film 3 includes abottom electrode layer contacting the first contact plugs 24, acapacitor dielectric layer and a top electrode layer overlying thebottom electrode layer in succession.

Still referring to FIG. 1, a second ILD layer 50 is deposited on thecrown oxide 40 and fills in the deep trenches 1. In addition to fillingthe cup shaped region of the deep trenches 1, the second ILD layer 50includes a portion with a thickness over the crown oxide 40. Materialsused to form the second ILD oxide layer 50 include PE-CVD dielectric,HDP dielectric, doped dielectric materials comprising carbon andsilicon, porous materials, and combination thereof. In some embodiments,the second ILD layer 50 is composed of fluorosilicate glass,carbon-doped silicate glass, and combinations thereof. Next, ananisotropic etching process, i.e., etch back process, or a planarizationtechnique, i.e., chemical mechanical polish can be employed on thesecond ILD oxide layer 50.

Another contact opening is then formed through the second ILD oxidelayer 50, the crown oxide 40 and the second etch stop layer 30, exposingthe underlying second contact plug 25. Conductive materials are filledinto the contact opening to form the bit-line conducting plug 60 that iselectrically connected to the second contact plug 25 on the substrate10. Materials of the bit-line conducting plug 60 include but not limitedto tungsten, tungsten alloys, copper or copper alloys.

A conductive layer 70 is deposited on the second ILD layer 50 andpatterned, forming a bitline in the memory cell region. The bitline isconductor line of copper or copper alloys. The bitline can electricallyconnect to the source/drain areas 17 through the bit-line contact plug60 and the second contact plug 25.

Attention is now invited to FIG. 2. FIG. 2 is an enlarged view of regionA circled by dotted line in FIG. 1. When etching the deep trench 1 byplasma dry etching, due to the desired narrow profile, sub-trenchesappear at the corner of the deep trench 1. Sub-trenches occurs at thebottom region of the deep trench 1 where the trench turns its directionnormally and when the trench encounters the first contact plug 24. Thedeep trench 1 has a pair of first sidewalls 1 a, a pair of sidewalls 1 band a bottom 1 c. The first sidewalls 1 a are substantially in paralleland stand the way along the crown oxide 40 and the second etch stoplayer 30. The deep trench 1 is recessed to expose the top of the firstcontact plug 24, and a slightly uneven or curved bottom 1 c is formed.In the formation of the curved bottom 1 c, an acute angle is formedbetween the bottom 1 c and the first contact plug 24, and a smallportion of the first contact plug 24 becomes the second sidewalls 1 b ofthe deep trench 1. In other words, the bottom 1 c is not entirelycoplanar with the top of the first contact plug 24 because of the narrowprofile of the deep trench 1 and drawbacks of an etching process, andthe first contact plug 24 also help to define the bottom topology of thedeep trench 1 by contributing the sidewalls 1 b. The waved bottom 1 chides a number of corners that are difficult to reach or fill.

Still referring to FIG. 2, the metal-insulator-metal film 3 is depositedin the deep trench 1. The layers, namely the bottom electrode layer,capacitor dielectric layer and top electrode layer, conformingly growalong the deep trench 1. The contour of the metal-insulator-metal film 3reflects the topology of the deep trench 1. The sub-trenches and acuteangles will also be reproduced and worst case deteriorated to evennarrower profile. Poor film deposition will induce leakage that islikely to lead to data state alter and even data corruption. Thecapacitor capacity can be seriously compromised. In order to preventleakage caused by crammed metal-insulator-metal film 3, before thedeposition of the film 3, the spacer 5 is deposited and then selectivelyetched such that the sub-trenches and acute corners are occupied by thespacer 5. In this regard, the bottom electrode layer follows the deeptrench contour where the sub-trenches and acute corners are modified toobtuse angles.

It should be understood that spacer 5 does not cover the entire surfaceof the deep trench 1 but portions thereof. As shown in FIG. 2, spacer 5is discrete and in non-uniform thickness. As a result, the sub-trenchcreated between one sidewall 1 a and the bottom 1 c is not reproducedbut transformed into a wider corner. When depositing the first layer ofthe metal-insulator-metal film 3, namely the bottom electrode layer, thelayer follows the wider corner that is collectively defined by a portionof the spacer 5 and the bottom 1 c of the deep trench 1. A roundercorner greatly reduces the chance of metal-insulator-metal film 3 beingcrammed when the capacitor dielectric layer and top electrode layer aredeposited.

Likewise, the acute angle created between the bottom 1 c and thesidewall of the first contact plug 24 is attenuated. Because ofselective etching of the spacer 5, in addition to non-uniform thickness,a portion of the spacer 5 is retained at the acute angle. The acutecorner is therefore transformed into an obtuse angle, leaving a moreopened bottom to fill in. The bottom electrode layer is conformal to thetopology created by the spacer 5, and therefore when the capacitordielectric layer and the top electrode are deposited, the acute angleswill not be reproduced and capacitor leakage can be minimized to an evengreater extent. The smoothness of the metal-insulator-metal film 3ensures the functionality of the capacitor.

Turning now to FIG. 3, illustrated is an embodiment of a method 100 forfabricating a dynamic random access memory (DRAM) device including ametal-insulator-metal capacitor. Embodiments of the method 100 shown inFIG. 3 are further illustrated in the schematic diagrams of FIGS. 4Athrough 4F, and reference should be made to these figures as called outin the text below. It should be noted that FIG. 4A is a cross-sectionalelevation view of the DRAM device. This same format is maintainedthroughout FIGS. 4A-4F.

As set forth in block S110 in FIG. 3, an etch stop layer is formed on aninterlevel dielectric layer. This is illustrated in FIG. 4A, which showsa DRAM cell in partially completed stage. The DRAM cell includes asubstrate 10, a plurality of gate electrodes 20, a plurality of firstcontact plugs 24 and second contact plugs 25 interposing in between eachtwo first contact plugs 24. These DRAM cells are described only brieflysince they are not essential for describing the novel features of theinstant disclosure. Shallow trench isolation regions 12 are formed inthe substrate 10 to isolate device regions. The shallow trench isolationregions 12 may be created with approaches including, but not limited to,etching trenches into the substrate, depositing isolating materials,polishing off the excess isolating materials and planarizing thetrenches. On the device region, a gate dielectric layer and a gateelectrode layer are successively formed on the substrate 10 and thenpatterned, forming gate dielectrics and gate electrodes 20. The gatedielectrics are formed of silicon oxide, silicon nitride, siliconoxynitride, silicon carbide, or other suitable dielectrics. The gateelectrodes 20 are formed of doped polysilicon, metals, metal alloys orsilicides. Source/drain regions 17 are then formed in the substrate 10,by implanting appropriate impurities depending on they type of device.In some embodiments, the source/drain regions 17 are of p-type. Inalternative embodiments, the source/drain regions 17 are of n-type. Anetch stop layer 22 is deposited on the gate electrodes 20, conformal tothe waved contour. An interlevel dielectric (ILD) layer 26 is formed onthe substrate 10 through, for example, LPCVD, APCVD or the like. Next,an etch back process is employed. The ILD layer 26 is recessed toaccommodate the contact plugs 24. Materials of contact plugs 24 includetungsten or alloys thereof and further include a composite structure.Another etch stop layer 30 is formed on the ILD layer 26, planarizingthe ILD layer and contact plugs 24.

Returning to FIG. 3, a crown oxide is formed on top of the stop layer,as set forth in block S120. This is illustrated in FIG. 4B, where thecrown oxide 40 have been formed on the etch stop layer 30. The crownoxide 40 is formed by CVD or LPCVD with high-k dielectric materials andthen planarized. The thickness of the crown oxide 40 ranges between 6000to 8000 Angstroms according to the type of device. In some embodiments,the crown oxide 40 has a thickness of 7200 Angstroms. The thickness ofthe crown oxide 40 later determines the depth profile of deep trenches.

As set forth in block S130, the crown oxide is etched to form aplurality of deep trenches. This is illustrated in FIG. 4C, where thedeep trenches 1 are formed in the crown oxide 40, exposing the contactplugs 24. The deep trenches 1 are formed by etching the crown oxide 40and the etch stop layer 30. The depth of the deep trenches 1 is matchedby the collective thickness of the crown oxide 40 and etch stop layer 30until the contact plugs 24 are exposed. Due to the nature of etchingback process, the bottom of the deep trenches 1 is slightly curvedupwards toward the opening. The curvature results in narrow, acutesub-trench formation at the junction of two sidewalls. Deposition oflayers in the deep trenches 1 will reproduce the narrow corners, andbulges may occur at nearby region to interrupt the smoothness of thefilm. Furthermore, cramming material into the narrow corner may bringundesired closeness or even merging of a single layer.

As set forth in block S140, a spacer is applied in the deep trenches.This is illustrated in FIG. 4D, where a spacer 5 is deposited into thedeep trenches 1. The spacer 5 is formed by automatic layer deposition(ALD) with gas treatment. Materials of the spacer 5 may be, for example,silicon nitride or the like. It should be understood that the materialof spacer 5 should not be oxide so as not to affect the normal functionof the capacitor. The thickness of the spacer 5 ranges between 50 and100 Angstroms according to desired result. A spacer thinner in profilehas less effect, namely the aspect ratio, to the electrode. A thickerspacer may slightly compromise the capacitance of the electrode. At thisstage, the spacer 5 is conformal to the deep trenches 1, and thesub-trenches are reproduced in the deposition.

Next, as set forth in block S150, the spacer is selectively etched. Thisis illustrated in FIG. 4E, where the spacer 5 is selectively dry etched.In order to attenuate the sub-trenches, anisotropic etching is carriedon the spacer 5. The spacer 5 is etched to non-uniform thickness anddistributed at different regions in the deep trenches 1. After selectiveetching, the spacer 5 occupies the sub-trenches and acute angles at thebottom of the deep trenches 1. As shown in FIG. 4E, the sub-trenches arefilled with the spacer 5, and therefore the corners are no longer sharpbut more rounded. It should be understood that the bottom of the deeptrenches is clear of the spacer 5. The purpose of the spacer 5 is tomodify the sub-trenches and acute angles to more opened corners. If thespacer 5 remains at the bottom of the deep trenches 1, the sub-trenchesand acute angles will be reproduced instead of being attenuated. Theobtuse angles prevent metal-insulator-metal film 3 from cramming suchthat capacitance will not be compromised where deep trenches have highaspect ratio.

Referring now to FIG. 4F, where a metal-insulator-metal film 3 isdeposited in the deep trenches 1 by, for example, CVD, sputterdeposition or the like. The metal-insulator-metal film 3 includes abottom electrode layer, a capacitor dielectric layer and a top electrodelayer. For the sake of clarity, layers are not shown. Materials of thebottom and top electrode layers include, but not limited to, Ti, Co,TiN, TiW, W, TiAl, TiAlN and combination thereof. Themetal-insulator-metal film 3 is not squeezed at the corner but depositedsmoothly over the topology created by the spacer 5, contact plug 24 andthe deep trenches 1. The aspect ratio of deep trench capacitor rangesbetween 8 and 10 after the deposition of the metal-insulator-metal film3.

Although not shown, it should be understood that further processing canbe carried out to the DRAM cell, which includes but not limited toforming a bitline contact plug over the remaining contact plug,depositing a second ILD layer exceeding the depth of the deep trenches,and forming a conductive layer as the bitline.

The instant disclosure provides a deep trench capacitor structure withmodified deep trench profile. More specifically, a spacer is depositedbefore the deposition of a metal-insulator-metal film. Because of thehigh aspect ratio of deep trenches, after etch back process, the bottomof the trench is slightly curved and, sub-trenches are created betweensidewall and the bottom. However, the width of the deep trenches canhardly broaden due to limited space, and therefore each deep trenchshould provide its maximum capacity without altering existing dimension.In this regard, the spacer fills in the sub-trenches with limited effectto the aspect ratio of the deep trench because the spacer is not uniformin thickness and discrete. The spacer modifies the contour of the deeptrench to a cup having rounded corner such that themetal-insulator-metal film does not cram or jam at the corner, and thechance of capacitor leakage can be greatly reduced. The capacitancestability can be ensured and data loss can be avoided.

In some embodiments, a method of manufacturing a semiconductor deviceincludes forming a source/drain region in a substrate. A firstinterlevel dielectric layer is formed on the substrate. A conductingplug is formed in the first interlevel dielectric layer, such that theconducting plug is electrically coupled to the source/drain region. Acrown oxide is formed on the first interlevel dielectric layer. A deeptrench is formed in the crown oxide to expose a top wall and a sidewallof the conducting plug. A spacer is formed on the sidewall of theconducting plug. A metal-insulator-metal film is formed in the deeptrench.

In some embodiments, a method of manufacturing semiconductor deviceincludes forming a source/drain region in a substrate. A firstinterlevel dielectric layer is formed on the substrate. A firstconducting plug is formed in the first interlevel dielectric layer suchthat the conducting plug is electrically coupled to the source/drainregion. A crown oxide is formed on the first interlevel dielectriclayer. A deep trench is formed in the crown oxide to expose the firstconducting plug. A spacer is formed in the deep trench such that thespacer is thicker at a bottom of the deep trench than at a top of thedeep trench. A metal-insulator-metal film is formed in the deep trench.

In some embodiments, a method of manufacturing semiconductor deviceincludes forming an etch stop layer over an interlevel dielectric layer.A crown oxide is formed on the etch stop layer. A deep trench is formedin the crown oxide. A spacer is formed in the deep trench. The spacer isselectively etched to remove the spacer at a top of the deep trench. Ametal-insulator-metal film is formed in the deep trench.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A method of manufacturing a semiconductor device,the method comprising: forming a source/drain region in a substrate;forming a first interlevel dielectric layer on the substrate; forming aconducting plug in the first interlevel dielectric layer such that theconducting plug is electrically coupled to the source/drain region;forming a crown oxide on the first interlevel dielectric layer; forminga deep trench in the crown oxide to expose a top wall and a sidewall ofthe conducting plug; forming a spacer that is in contact with thesidewall of the conducting plug; and forming a metal-insulator-metalfilm in the deep trench and on the spacer that is in contact with thesidewall of the conducting plug.
 2. The method of claim 1, furthercomprising: lining the spacer on a sidewall and a bottom wall of thedeep trench; and removing the spacer on the bottom wall of the deeptrench to expose the first interlevel dielectric layer.
 3. The method ofclaim 1, further comprising: lining the spacer on a sidewall and abottom wall of the deep trench; and thinning the spacer on the sidewallof the deep trench.
 4. The method of claim 1, further comprising:depositing the metal-insulator-metal film on the spacer, the firstinterlevel dielectric layer, and the conducting plug.
 5. The method ofclaim 1, further comprising: forming a second interlevel dielectriclayer on the metal-insulator-metal film and the crown oxide; and forminga conductive layer on the second interlevel dielectric layer.
 6. Amethod of manufacturing a semiconductor device, the method comprising:forming a first source/drain region in a substrate; forming a firstinterlevel dielectric layer on the substrate; forming a first conductingplug in the first interlevel dielectric layer such that the firstconducting plug is electrically coupled to the first source/drainregion; forming a crown oxide on the first interlevel dielectric layer;forming a deep trench in the crown oxide to expose the first conductingplug such that the first conducting plug protrudes from the firstinterlevel dielectric layer; forming a spacer in the deep trench suchthat the spacer is thicker at a bottom sidewall of the deep trench thanat a top sidewall of the deep trench; and forming ametal-insulator-metal film in the deep trench and in contact with thetop sidewall of the deep trench, wherein a bottommost portion of themetal-insulator-metal film is higher than a bottommost portion of thespacer.
 7. The method of claim 6, further comprising: removing thespacer on a bottom wall of the deep trench to expose the firstconducting plug and the first interlevel dielectric layer.
 8. The methodof claim 6, further comprising: thinning the spacer on the top sidewallof the deep trench.
 9. The method of claim 6, further comprising:depositing the metal-insulator-metal film on the spacer, the firstinterlevel dielectric layer, and the first conducting plug.
 10. Themethod of claim 6, further comprising: forming a second conducting plugon a second source/drain region in the first interlevel dielectriclayer.
 11. The method of claim 10, further comprising: forming a secondinterlevel dielectric layer on the metal-insulator-metal film and thecrown oxide.
 12. The method of claim 11, further comprising: forming athird conducting plug in the crown oxide and the second interleveldielectric layer, the third conducting plug being electrically coupledto the second conducting plug.
 13. The method of claim 12, furthercomprising: forming a conductive layer on the second interleveldielectric layer, the conductive layer being electrically coupled to thethird conducting plug.
 14. The method of claim 6, further comprising:forming an etch stop layer between the crown oxide and the firstinterlevel dielectric layer.
 15. The method according to claim 6,wherein forming the spacer in the deep trench comprises: forming aspacer layer in the deep trench after forming the deep trench of thecrown oxide; and selectively etching the spacer layer to form thespacer.
 16. A method of manufacturing a semiconductor device, the methodcomprising: forming an etch stop layer over a first interleveldielectric layer; forming a crown oxide on the etch stop layer; forminga deep trench in the crown oxide; forming a spacer on a bottom sidewalland a top sidewall of the deep trench; selectively etching the spacer toexpose the top sidewall of the deep trench; forming ametal-insulator-metal film in the deep trench; and forming a secondinterlevel dielectric layer inside the deep trench, wherein forming thedeep trench is performed such that a portion of a top surface of thefirst interlevel dielectric layer is exposed by the deep trench and suchthat the exposed portion of the top surface of the first interleveldielectric layer is convex.
 17. The method according to claim 16,further comprising: removing the spacer on a bottom wall of the deeptrench.
 18. The method according to claim 16, further comprising:depositing the metal-insulator-metal film on the spacer on the bottomsidewall and a bottom wall of the deep trench.
 19. The method accordingto claim 16, wherein a bottommost portion of the second interleveldielectric layer is higher than a bottommost portion of the spacer. 20.The method according to claim 16, further comprising: prior to formingthe etch stop layer, forming a conducting plug in the first interleveldielectric layer, wherein forming the second interlevel dielectric layeris performed such that a bottom surface of the second interleveldielectric layer is higher than a top surface of the conducting plug.